CVD / PECVD Tube Furnace
Inquiry NowProduct Description
The CVD / PECVD Tube Furnace is an advanced thin film deposition system based on Chemical Vapour Deposition (CVD) and Plasma-Enhanced Chemical Vapour Deposition (PECVD) technologies. It is designed to deposit high-quality thin films on a wide range of materials including metals, semiconductors, ceramics, and insulating substrates.
This system is widely used in microelectronics, optoelectronics, flat panel displays, energy storage research, and advanced material development, where precise control of film uniformity, thickness, and process stability is essential.
Key Features of CVD / PECVD Tube Furnace
- RF-PECVD compatible high-purity Al₂O₃ ceramic tube
- Automatic over-temperature protection with power cut-off
- Double-layer air-cooling furnace shell for enhanced safety
- Advanced RF glow discharge technology for high deposition efficiency
- High uniformity across large substrate areas using multi-point RF feed technology
- Substrate-to-substrate thickness deviation < 2%
- Stable operation suitable for long-duration processes
- Standard configuration includes direct-connected vacuum pump
- Clean vacuum performance with ultimate vacuum grade
- Equipped with three-way mass flow meters for gas control
Typical Technical Specifications of CVD Chemical Vapor Deposition System
| Parameter | Specification |
|---|---|
| Product Name | CVD Chemical Vapor Deposition System |
| Model | BR-CVD/PECVD |
| Slide | With slide, the furnace can be slid to achieve rapid heating or cooling function |
| Heating Zone Length | 400mm single heating zone / dual heating zone |
| Furnace Tube Size | 60 × 1200mm (outer diameter × length) |
| Furnace Tube Material | High purity quartz tube |
| Operating Temperature | ≤1100°C |
| Temperature Control System | Artificial intelligence PID instrument, automatic temperature control |
| Temperature Control Accuracy | ±1°C (with over-temperature and thermocouple-off alarm functions) |
| Heating Rate | Recommended 0–10°C/min |
| Heating Element | High quality resistance wire |
| Vacuum System | — |
| Rated Voltage | Single phase 220V 50Hz |
| Gas Filling System | Inert gases such as nitrogen and argon |
| Temperature Measuring | Thermocouple temperature measurement |
| Shell Structure | Double-layer shell structure with air cooling system |
| Vacuum Flange | It has an air inlet and a pressure control valve; pneumatic pressure relief valve and air release valve at the other end |
| Air Supply System | Four-way precision proton flow meter; adjust gas flow through touch screen |
| Vacuum System | Rotary vane pump; the vacuum degree can reach 1Pa in the cold state of the empty furnace
Vacuum gauge; imported digital vacuum gauge displays the vacuum degree in real time with high accuracy |
| Gas Dosing System | The overall pressure range can be controlled –20kPa to 20kPa (relative pressure) |
| Rated Voltage | Single phase 220V 50Hz |
| RF Power Supply (PECVD only) | — |
| Signal Frequency | 13.56MHz ±0.005% |
| Power Output Range | 500W |
| Maximum Reflected Power | 500W |
| RF Output Interface | 50Ω-N type, female |
| Power Stability | ≤0.1% |
| Harmonic Components | ≤-50dbc |
| Supply Voltage | Single-phase AC (187V–253V), frequency 50/60Hz |
| Overall Machine Efficiency | ≥70% |
| Power Factor | ≥90% |
| Cooling Method | Forced air cooling |
| Model | Tube Outer Dia * heating zone (mm) | Tube Length (mm) | Power (kW) | Max temp
(0C) |
Gas Control | Vacuum
(Pa) |
| MK-CVD-60 | Ø60*400 | 1200 | 3 | 1200 | 3 Way | 10Pa/7 x 10-3 |
| MK-CVD-80 | Ø80*400 | 1200 | 4 | 1200 | 3 Way | 10Pa/7 x 10-3 |
| MK-CVD-100 | Ø80*400 | 1200 | 6 | 1200 | 3 Way | 10Pa/7 x 10-3 |
| Model | Tube Outer Dia * heating zone (mm) | Tube Length (mm) | Power (kW) | Max temp
(0C) |
RF Power Supply | Gas Control | Vacuum
(Pa) |
|
| Frequency | Power (W) | |||||||
| MK-CVD-60 | Ø60*400 | 1200 | 3 | 1200 |
13.56MHz±0.005% |
300-500 |
3 Way | 10Pa/7 x 10-3 |
| MK-CVD-80 | Ø80*400 | 1200 | 4 | 1200 | 3 Way | 10Pa/7 x 10-3 | ||
| MK-CVD-100 | Ø80*400 | 1200 | 6 | 1200 | 3 Way | 10Pa/7 x 10-3 | ||
Applications of CVD & PECVD furnace systems
- Semiconductor thin film deposition
- Microelectronics & IC fabrication
- Optoelectronic materials research
- Flat panel display coatings
- Energy storage materials & battery research
- Protective and functional coatings
- Advanced ceramic and composite materials
- University, R&D, and industrial laboratories
Why Choose M-Kube
- Expertise in high-temperature CVD & PECVD furnace systems
- Proven solutions for thin film deposition and plasma processing
- High process stability and excellent film uniformity
- Custom-configured systems based on application requirements
- Reliable after-sales technical support
All M-Kube ceramic and refractory products are manufactured in ISO-certified facilities and tested in accordance with relevant ASTM standards. This ensures each component meets global benchmarks for quality, consistency, and material performance.
Buy CVD / PECVD Tube Furnace in Australia – Request a Quote
Looking for a CVD furnace, PECVD tube furnace, or a high-temperature vacuum deposition system for your laboratory or production line?
📞 Call +61-478-594-746
📧 Email info@mkube.com.au
👉 For expert assistance or to discuss your CVD / PECVD furnace requirements, contact M-Kube today.
Product FAQ's
What is the difference between a horizontal and a vertical tube furnace?
-A horizontal tube furnace is ideal for processes requiring longer sample tubes and easy sample insertion.
-A vertical tube furnace is used when samples must be suspended or heated evenly from all sides.
What tube furnace sizes are available?
Options range from small tube furnace models for compact lab setups to larger laboratory tube furnace systems for industrial or R&D environments.
What factors affect tube furnace price?
The tube furnace price varies based on temperature rating, tube diameter, heating zone length, control system, and whether it’s a lab tube furnace, vacuum system, or a brand-specific model like Tube Furnace Thermo Scientific.
Do tube furnaces support controlled atmosphere heating?
Yes, most lab tube furnace models support options such as vacuum, inert gas (argon, nitrogen), and forming gas.
How long is the lead time for tube furnaces?
Lead time varies based on model type—vacuum tube furnace and customized systems take longer. We maintain stock of standard small tube furnace, horizontal, and vertical models to ensure faster delivery.
What atmosphere options can your tube furnaces support?
We offer furnaces capable of operating under air, inert gases (argon, nitrogen), vacuum, and forming gas. For advanced applications, our vacuum tube furnace models include sealed flanges, vacuum pumps, and gas flow controllers.
Related products
- Phone: +61-478-901-616
- Address:
8 Adaluma Ave,
Pooraka SA 5095,
Australia - Email: info@mkube.com.au